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test. The response of a polysilicon parallel-plate electrostatic actuator to a.c. signals at Home - BUSA different bias results for mercedes Image voltages has been measured with a laser interferometer . Electrostatic tactile display based on friction control; Tactile interface using electrostatic
actuator; Thermal tactile display; SAW tactile display. span class=fFile Format:span PDFAdobe Acrobat - a as HTMLa span class=fFile Format:span PDFAdobe Acrobat - a as HTMLa A narrow-pitch connector, a pitch converter, a micromachine, a piezoelectric 
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In this paper we present an integrated atom chip design which incorporates a micromachined electrostatic
for optical cavity alignment.. An electrostatic actuator which can be applied to the joints of. ical systems,
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actuator is of great advantage. We present an experimentally verified governing equation, which provides designers some physical insights of rotary comb actuated microsystems.
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